| PV/RMS (nm) | H = 0.5 mm | H = 1 mm | H = 1.5 mm | H = 2 mm |
| 137.00/34.83 | 70.02/15.47 | 57.77/9.93 | 62.20/11.25 | |
| 面形 |
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| PV/RMS (nm) | H = 0.5 mm | H = 1 mm | H = 1.5 mm | H = 2 mm |
| 137.00/34.83 | 70.02/15.47 | 57.77/9.93 | 62.20/11.25 | |
| 面形 |
|
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